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- 2022
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Mark
Sequential Infiltration Synthesis into Maltoheptaose and Poly(styrene): Implications for Sub-10 nm Pattern Transfer
(
- Contribution to journal › Article
- 2021
-
Mark
Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer
2021) Advances in Patterning Materials and Processes XXXVIII 2020 In Proceedings of SPIE - The International Society for Optical Engineering 11612.(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2018
-
Mark
Nanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
(
- Contribution to journal › Article
- 2003
-
Mark
Lift-off process for nanoimprint lithography
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding