Lars Montelius

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2002
Mark Polymer stamps for nanoimprinting
Pfeiffer, K ; Fink, M ; Ahrens, G ; Gruetzner, G ; Reuther, F ; Seekamp, J ; Zankovych, S ; Torres, CMS ; Maximov, Ivan ^LU and Beck, Marc ^LU , et al. (2002) In Microelectronic Engineering 61-2. p.393-398
- Contribution to journal › Article
Mark Improving stamps for 10 nm level wafer scale nanoimprint lithography
Beck, Marc ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Ling, TGI ; Keil, M and Montelius, Lars ^LU (2002) In Microelectronic Engineering 61-2. p.441-448
- Contribution to journal › Article
Mark Epitaxially overgrown, stable W-GaAs Schottky contacts with sizes down to 50 nm
Wernersson, Lars-Erik ^LU ; Georgsson, K ; Gustafsson, Anders ^LU ; Löfgren, Anneli ^LU ; Montelius, Lars ^LU ; Nilsson, N ; Pettersson, H ; Seifert, Werner ^LU ; Samuelson, Lars ^LU and Malm, Jan-Olle ^LU (2002) In Journal of Vacuum Science and Technology B 20(2). p.580-589
- Contribution to journal › Article
Mark Investigation of polymethylmethacrylate resist residues using photoelectron microscopy
Maximov, Ivan ^LU ; Zakharov, AA ; Holmqvist, Tommy ^LU ; Montelius, Lars ^LU and Lindau, Ingolf ^LU (2002) 20th North American Conference on Molecular Beam Epitaxy 20(3). p.1139-1142
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint lithography for fabrication of three-terminal ballistic junctions in InP/GaInAs
Maximov, Ivan ^LU ; Carlberg, Patrick ^LU ; Wallin, Daniel ^LU ; Shorubalko, Ivan ^LU ; Seifert, Werner ^LU ; Xu, Hongqi ^LU ; Montelius, Lars ^LU and Samuelson, Lars ^LU (2002) In Nanotechnology 13(5). p.666-668
- Contribution to journal › Article
Mark Ultrahigh vacuum scanning probe investigations of metal induced void formation in SiO2/Si(111))
Håkanson, Ulf ^LU ; Ohlsson, Jonas ^LU ; Montelius, Lars ^LU and Samuelson, Lars ^LU (2002) 6th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors 20(1). p.226-229
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Single InP/GaInP quantum dots studied by scanning tunneling microscopy and scanning tunneling microscopy induced luminescence
Håkanson, Ulf ^LU ; Johansson, Mikael ^LU ; Persson, Jonas ^LU ; Johansson, Jonas ^LU ; Pistol, Mats-Erik ^LU ; Montelius, Lars ^LU and Samuelson, Lars ^LU (2002) In Applied Physics Letters 80(3). p.494-496
- Contribution to journal › Article
Mark Fabrication of Si-based nanoimprint stamps with sub-20 nm features
Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Beck, Marc ^LU ; Deppert, Knut ^LU ; Graczyk, Mariusz ^LU ; Magnusson, Martin ^LU and Montelius, Lars ^LU (2002) Micro and Nano Engineering 2001 61-2. p.449-454
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Photon mapping of single quantum dots by scanning tunneling microscopy induced luminescence spectroscopy
Håkanson, Ulf ^LU ; Johansson, M.K.-J. ; Holm, Magnus ^LU ; Persson, Jonas ^LU ; Sass, T. ; Pistol, Mats-Erik ^LU ; Montelius, Lars ^LU and Samuelson, Lars ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Nanoimprint lithography: opportunities and applications
Montelius, Lars ^LU (2002) Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference p.18-19
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding