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2009
Mark Gold cleaning methods for electrochemical detection applications
Fischer, Lee M. ; Tenje, Maria ^LU ; Heiskanen, Arto R. ; Masuda, Noriyuki ; Castillo Leon, Jaime ^LU ; Bentien, Anders ; Emnéus, Jenny ^LU ; Jakobsen, Mogens H. and Boisen, Anja (2009) In Microelectronic Engineering 86(4-6). p.1282-1285
- Contribution to journal › Article
2008
Mark Selective etching of III-V nanowires for molecular junctions
Kallesoe, Christian ; Molhave, Kristian ; Mårtensson, Thomas ^LU ; Hansen, Torben Mikael ; Samuelson, Lars ^LU and Boggild, Peter (2008) In Microelectronic Engineering 85(5-6). p.1179-1181
- Contribution to journal › Article
Mark Nanoimprint in PDMS on glass with two-level hybrid stamp
Carlberg, Patrick ^LU ; Montelius, Lars ^LU and Tegenfeldt, Jonas ^LU (2008) In Microelectronic Engineering 85(1). p.210-213
- Contribution to journal › Article
2006
Mark Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing
Nordström, Maria ^LU ; Hübner, Jörg and Boisen, Anja (2006) In Microelectronic Engineering 83(4/9). p.1269-1272
- Contribution to journal › Article
Mark Exposure parameters for MeV proton beam writing on SU-8
Auzelyte, Vaida ^LU ; Elfman, Mikael ^LU ; Kristiansson, Per ^LU ; Nilsson, Christer ^LU ; Pallon, Jan ^LU ; Arteaga, Natalia ^LU and Wegdén, Marie ^LU (2006) In Microelectronic Engineering 83(10). p.2015-2020
- Contribution to journal › Article
2005
Mark Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold
Nordström, Maria ^LU ; Johansson, Alicia ; Sánchez Noguerón, Encarnacion ; Clausen, Bjarne ; Calleja, Montserrat and Boisen, Anja (2005) In Microelectronic Engineering 78/79. p.152-157
- Contribution to journal › Article
Mark Dry release of all-polymer structures
Haefliger, D. ; Nordström, Maria ^LU ; Rasmussen, P. A. and Boisen, Anja (2005) In Microelectronic Engineering 78/79. p.88-92
- Contribution to journal › Article
2004
Mark Dry release of suspended nanostructures
Forsen, E ; Davis, ZJ ; Dong, M ; Ghatnekar-Nilsson, Sara ^LU ; Montelius, Lars ^LU and Boisen, A (2004) In Microelectronic Engineering 73-74. p.487-490
- Contribution to journal › Article
Mark Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
Forsen, E ; Carlberg, Patrick ^LU ; Montelius, Lars ^LU and Boisen, A (2004) In Microelectronic Engineering 73-74. p.491-495
- Contribution to journal › Article
Mark Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Beck, Marc ^LU ; Persson, F ; Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Ling, TGI and Montelius, Lars ^LU (2004) In Microelectronic Engineering 73-74. p.837-842
- Contribution to journal › Article

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