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- 2009
-
Mark
Deposition of HfO2 on InAs by atomic-layer deposition
(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
- 2008
-
Mark
Selective etching of III-V nanowires for molecular junctions
(
- Contribution to journal › Article
-
Mark
Nanoimprint in PDMS on glass with two-level hybrid stamp
(
- Contribution to journal › Article
- 2006
-
Mark
Exposure parameters for MeV proton beam writing on SU-8
(
- Contribution to journal › Article
-
Mark
Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing
(
- Contribution to journal › Article
- 2005
-
Mark
Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold
(
- Contribution to journal › Article
-
Mark
Dry release of all-polymer structures
(
- Contribution to journal › Article
- 2004
-
Mark
Dry release of suspended nanostructures
(
- Contribution to journal › Article
-
Mark
Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
(
- Contribution to journal › Article
-
Mark
Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
(
- Contribution to journal › Article