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- 2023
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Mark
New high-resolution SiO2-based positive-tone resist for electron beam lithography
2023) 49-th International Conference on Micro- and Nano-Engineering(
- Contribution to conference › Poster
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Mark
Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
2023) 23-rd International Conference on Atomic Layer Deposition(
- Contribution to conference › Abstract
- 2022
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Mark
Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps
(
- Contribution to journal › Article
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Mark
Investigating the Secondary Electron Emission of Nanomaterials Induced by a High-Resolution Proton Beam
2022) In Physica Status Solidi (B)(
- Contribution to journal › Article
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Mark
Directed Self‐Assembly for Dense Vertical III–V Nanowires on Si and Implications for Gate All‐Around Deposition
(
- Contribution to journal › Article